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Room: EV011.119, Bldg: EV

November 2019

CMOS-MEMS Devices for Communication Systems and Nano Instrumentations

November 11 @ 1:30 pm - 3:00 pm EST

This talk introduces a class of devices and instrumentations that leverage the myriad economic benefits of having integrated systems with both electrical and mechanical functionality on a single-chip. This is enabled by a CMOS post-processing technique developed at the University of Waterloo to create MEMS devices within CMOS chips. We integrate actuation, sensing and control electronics on a single CMOS-chip. This unique chip-scaled technology platform enables the development of highly advanced devices for a wide range of applications including radio…

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